BibTeX record journals/mr/UusluotoJLT04

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@article{DBLP:journals/mr/UusluotoJLT04,
  author    = {Teija Uusluoto and
               Paavo Jalonen and
               Harri Laaksonen and
               Aulis Tuominen},
  title     = {Metallization of microvias by sputter-deposition},
  journal   = {Microelectronics Reliability},
  volume    = {44},
  number    = {4},
  pages     = {587--593},
  year      = {2004},
  url       = {https://doi.org/10.1016/j.microrel.2003.08.001},
  doi       = {10.1016/j.microrel.2003.08.001},
  timestamp = {Sun, 28 May 2017 13:23:39 +0200},
  biburl    = {https://dblp.org/rec/bib/journals/mr/UusluotoJLT04},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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